Thermodynamic Assessment of the Possibility of the Deposition of Silicon Borides from Their Halogenides
Crossref DOI link: https://doi.org/10.3103/S1067821218030136
Published Online: 2016-12-19
Published Print: 2018-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Timofeev, P. A.
Timofeev, A. N.
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