Mechanical Properties and Heat Resistance of Ta–Zr–Si–B–C–N Coatings Obtained upon the Magnetron Sputtering of the TaZrSiB Target in Ar, N2, and C2H4 Atmosphere
Crossref DOI link: https://doi.org/10.3103/S1067821220060103
Published Online: 2020-12-28
Published Print: 2020-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kiryukhantsev-Korneev, Ph. V.
Sytchenko, A. D.
Levashov, E. A.
Lobova, T. A.
Text and Data Mining valid from 2020-11-01
Version of Record valid from 2020-11-01
Article History
Received: 20 December 2019
Revised: 9 January 2020
Accepted: 13 January 2020
First Online: 28 December 2020