Modeling and Simulation of Capacitive MEMSComb Accelerometer for sensitivity improvement with different Proof Mass Patterns
Crossref DOI link: https://doi.org/10.35940/ijeat.F8406.088619
Published Online: 2019-08-30
Update policy: https://doi.org/10.35940/beiesp.crossmarkpolicy
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Ganta, Anusha
Talam*, Satyanarayana
R, Neela.