Modeling and analyzing for contact hole shrinkage by directed self-assembly
Crossref DOI link: https://doi.org/10.3938/jkps.65.1701
Published Online: 2014-12-06
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Sang-Kon
Text and Data Mining valid from 2014-11-01