Crystallization of a-Si films with smooth surfaces by using Blue Multi-Laser Diode Annealing
Crossref DOI link: https://doi.org/10.3938/jkps.66.1265
Published Online: 2015-05-06
Published Print: 2015-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Okada, Tatsuya
Sugihara, Kouya
Chinen, Satoshi
Noguchi, Takashi
Text and Data Mining valid from 2015-04-01