Improving the gas barrier and mechanical properties of a-SiO x films synthesized at low temperature by using high energy and hydrogen flow rate control
Crossref DOI link: https://doi.org/10.3938/jkps.66.1410
Published Online: 2015-05-15
Published Print: 2015-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Jin, Su B.
Long, Wen
Sahu, B. B.
Han, Jeon G.
Hori, M.
Text and Data Mining valid from 2015-05-01