A novel two-axis parallel-kinematic high-speed piezoelectric scanner for atomic force microscopy
Crossref DOI link: https://doi.org/10.3938/jkps.69.691
Published Online: 2016-09-22
Published Print: 2016-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Alunda, Bernard Ouma
Lee, Yong Joong
Park, Soyeun
License valid from 2016-09-01
