Growth of epitaxial TiN (111) thin films with low resistivity on Si (111) by crossed-beam pulsed laser deposition
Crossref DOI link: https://doi.org/10.3938/jkps.71.111
Published Online: 2017-07-22
Published Print: 2017-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kang, Sukill
Rouleau, C. M.
License valid from 2017-07-01