A carbon contamination cleaning of gold film by electron beam irradiation with minimum structural damages
Crossref DOI link: https://doi.org/10.3938/jkps.71.467
Published Online: 2017-10-11
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Park, D. J.
Kang, T. H.
Kim, D. S.
Kim, H. T.
Choi, S. B.
License valid from 2017-10-01