Degradation Test for an Anodic Aluminum Oxide Film in Plasma Etching
Crossref DOI link: https://doi.org/10.3938/jkps.74.1046
Published Online: 2019-06-11
Published Print: 2019-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Seung-Su
Kim, Min-Joong
Chung, Chin-Wook
Song, Je-Boem
Oh, Seong-Geun
Kim, Jin-Tae
Chung, Nak-Kwan
Yun, Ju-Young
Text and Data Mining valid from 2019-06-01
Version of Record valid from 2019-06-01
Article History
Received: 10 January 2019
Revised: 4 March 2019
First Online: 11 June 2019