Fabrication of Si-based AFM Probe with High Q-factor for Fast Non-Contact Mode Scanning
Crossref DOI link: https://doi.org/10.3938/jkps.74.94
Published Online: 2019-01-26
Published Print: 2019-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bahn, Sebin
Choi, Soo Bong
Park, Woongkyu
Jeong, Hae-Yong
Park, Kyung-Ho
Text and Data Mining valid from 2019-01-01
Article History
Received: 18 August 2018
First Online: 26 January 2019