Effect of the Film Thickness on the Work Function of Pt-Ru Bimetallic Alloy Films by Atomic Layer Deposition
Crossref DOI link: https://doi.org/10.3938/jkps.75.1
Published Online: 2019-07-08
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Chang-Min
Lee, Woo-Jae
Bera, Susanta
Kwon, Se-Hun
Text and Data Mining valid from 2019-07-01
Version of Record valid from 2019-07-01
Article History
Received: 3 May 2019
Revised: 20 May 2019
Accepted: 20 May 2019
First Online: 8 July 2019