Effects of the Nonequilibrium Model and the Discharge Frequency on an Argon Inductively Coupled Plasma Simulation
Crossref DOI link: https://doi.org/10.3938/jkps.75.131
Published Online: 2019-07-22
Published Print: 2019-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yu, Minghao
Ma, Libin
Liu, Kai
Text and Data Mining valid from 2019-07-01
Version of Record valid from 2019-07-01
Article History
Received: 24 January 2019
Revised: 20 May 2019
Accepted: 21 May 2019
First Online: 22 July 2019