A Study on Computational Fluid Dynamic Simulations to Improve the Thickness Uniformity of Porous Metal Films Deposited by Using Cluster Sputtering
Crossref DOI link: https://doi.org/10.3938/jkps.76.27
Published Online: 2020-01-11
Published Print: 2020-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Jun Hyeong
Park, Se Yong
Lee, Hee Chul
Yun, Sung Ho
Lee, Ho Nyun
Text and Data Mining valid from 2020-01-01
Version of Record valid from 2020-01-01
Article History
Received: 26 July 2019
Accepted: 2 October 2019
First Online: 11 January 2020