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Study on the Oxidant Effect for Nitrogen Trifluoride Abatement by Using a 2.45 GHz Microwave Plasma Torch

Crossref DOI link: https://doi.org/10.3938/jkps.76.895

Published Online: 2020-05-29

Published Print: 2020-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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