Investigating the Wafer Temperature in an Atmospheric-Pressure Plasma Process
Crossref DOI link: https://doi.org/10.3938/jkps.77.477
Published Online: 2020-09-29
Published Print: 2020-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kwon, Gi-Chung
Kim, Woo Jae
Lee, Tae Hyun
Lee, Hwan Hee
Kwon, Hee Tae
Shin, Gi Won
Text and Data Mining valid from 2020-09-01
Version of Record valid from 2020-09-01
Article History
Received: 16 January 2020
Revised: 10 March 2020
Accepted: 10 June 2020
First Online: 29 September 2020