Facing-target mid-frequency magnetron reactive sputtered hafnium oxide film: Morphology and electrical properties
Crossref DOI link: https://doi.org/10.3938/jkps.68.679
Published Online: 2016-03-08
Published Print: 2016-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Yu
Xu, Jun
Wang, You-Nian
Choi, Chi Kyu
Zhou, Da-Yu
Text and Data Mining valid from 2016-03-01