Flexible Carbon-rich Al2O3 Interlayers for Moisture Barrier Films by a Spatially-Resolved Atomic Layer Deposition Process
Crossref DOI link: https://doi.org/10.3938/jkps.73.40
Published Online: 2018-07-11
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yong, Sang Heon
Kim, Sun Jung
Park, Jang Soon
Cho, Sung Min
Ahn, Hyung June
Chae, Heeyeop
Text and Data Mining valid from 2018-07-01
Article History
Received: 26 March 2018
Accepted: 5 April 2018
First Online: 11 July 2018