A Solid-State Thin-Film Electrolyte, Lithium Silicon Oxynitride, Deposited by using RF Sputtering for Thin-Film Batteries
Crossref DOI link: https://doi.org/10.3938/jkps.76.855
Published Online: 2020-05-12
Published Print: 2020-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Na, Dan
Lee, Byeongjun
Yoon, Baeksang
Seo, Inseok
Text and Data Mining valid from 2020-05-01
Version of Record valid from 2020-05-01
Article History
Received: 12 February 2020
Revised: 25 March 2020
Accepted: 13 April 2020
First Online: 12 May 2020