Growth of a Thick AlN Epilayer by Using the Mixed-Source Hydride Vapor Phase Epitaxy Method
Crossref DOI link: https://doi.org/10.3938/jkps.77.282
Published Online: 2020-08-29
Published Print: 2020-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Kim, Kyoung Hwa
Park, Jung Hyun
Ahn, Hyung Soo
Yang, Min
Yi, Sam Nyung
Jeon, Injun
Cho, Chae Ryong
Kim, Suck-Whan
Text and Data Mining valid from 2020-08-01
Version of Record valid from 2020-08-01
Article History
Received: 20 April 2020
Accepted: 27 May 2020
First Online: 29 August 2020